Compact Plasma and Focused Ion Beams by Sudeep Bhattacharjee

By Sudeep Bhattacharjee

Recent study has introduced the appliance of microwaves from the classical fields of heating, verbal exchange, and iteration of plasma discharges into the iteration of compact plasmas that may be used for functions reminiscent of FIB and small plasma thrusters. even though, those new purposes deliver with them a brand new set of demanding situations. With insurance starting from the fundamentals to new and rising functions, Compact Plasma and concentrated Ion Beams discusses how compact high-density microwave plasmas with dimensions smaller than the geometrical cutoff size may be generated and applied for delivering targeted ion beams of assorted parts.

Starting with the basics of the cutoff challenge for wave propagation in waveguides and plasma diagnostics, the writer is going directly to clarify intimately the plasma construction by way of microwaves in a compact geometry and slim tubes. He then completely discusses wave interplay with bounded plasmas and offers a deeper figuring out of the physics. The booklet concludes with an updated account of modern examine on pulsed microwaves and the applying of compact microwave plasmas for multi-element FIB.

It offers a consolidated and unified description of the rising components in plasma technological know-how and know-how using wave-based plasma assets in response to the author’s personal paintings and adventure. The e-book may be valuable not just to tested researchers during this sector yet also will function a superb creation to these drawn to utilising those rules to varied present and new applications.

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Sample text

Hatta, M. Kubo, Y. Yasaka, and R. Itatani. 1992. Performance of electron cyclotron resonance plasma produced by a new microwave launching system in a multicusp magnetic field with permanent magnets, Jpn. J. Appl. Phys. 31: 1473–1479. 16. A. M. Gorbatkin. 1995. Permanent magnet electron cyclotron resonance plasma source with remote window, J. Vac. Sci. Technol. A 13: 343–348. M. Pichot, A. Durandet, J. Pelletier, Y. Arnal, and L. Vallier. 1998. Microwave multipolar plasmas excited by distributed electron cyclotron resonance: Concept and performance, Rev.

It will also break down and form a plasma if the applied electric field is alternating, such as with a high frequency. 45 GHz, respectively. There are several advantages in this process of gaseous breakdown. It provides a possibility of having an electrodeless discharge and helps to result in clean plasma, free from contaminants into the plasma coming from the electrodes. When using an rf coil, the alternating electric field can easily penetrate the dielectric, such as glass, and the like, in which the plasma is confined and accelerates the electrons in the vessel to energies above the ionization potential of the gas.

This way, the I–V characteristics can be traced. The signal can also be taken to an oscilloscope if it has an X–Y mode of plotting.

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